In small punch testing, with approximate preknowledge of the sample deformation, profile measurement need only be made at selected locations in depth. To date, profilometry through full-field low-coherence interferometry has not been applied to small punch testing-conventional methods typically measure the maximum displacement as the sample is deformed, ignoring useful shape and profile information. A modification of full-field low-coherence interferometry is presented, where a digital stepper motor is combined with piezoelectric transducer scanning to achieve random depth access three-dimensional micrometer profile measurement. Offering a rapid, inexpensive, and functional machine vision system, the measurement technique is applied to a small punch test. (C) 2006 Elsevier Ltd. All rights reserved.