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Mandatory Fields
Reviews
Tofail, SAM;Mani, A;Bauer, J;Silien, C
2018
June
In Situ, Real-Time Infrared (IR) Imaging for Metrology in Advanced Manufacturing
Published
1
9 ()
Optional Fields
FLUORESCENCE MICROSCOPY SPATIAL-RESOLUTION DIFFRACTION LIMIT THERMOGRAPHY PERFORMANCE CHALLENGES
This position paper provides a topical overview on the translation of infrared (IR)-based imaging techniques in metrological applications related to advance manufacturing with a particular focus on in situ imaging to obtain real-time process information. Fast imaging techniques using optical, X-ray, e-beam, ultrasound, or scanning probes are widely used in non-destructive testing (NDT), the translation of which to metrology requires detailed consideration of the technique in question as well as the instrumentation and adaption choices available. We review the use of IR imaging for metrology in advanced manufacturing based on the current use of IR thermography (IRT) and spectro-microscopy. We then discuss the opportunity of, and barriers against, the use IR techniques as potential metrological tools in advanced manufacturing and discuss technological directions that can be taken to enable rapid, real-time ambient measurements.
WEINHEIM
WILEY-V C H VERLAG GMBH
1438-1656
10.1002/adem.201800061
Grant Details